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专利名称：Flow detector element of thermosensible
flow sensor
发明人：Masahiro Kawai申请号：US11605454申请日：20061129
公开号：US20070295083A1公开日：20071227
专利附图：
摘要：Detection accuracy of flow rates is higher even when the temperature of fluid isvaried or when there is any difference between temperature of fluid and that around athermosensible flow sensor. A thermosensible detector element comprises an insulating
support film formed on the surface of a plate-like substrate, a heat resistor and a fluidtemperature-measuring resistor made of thermosensible resistive films formed on thissupport film, an insulating protective film formed on this thermosensible resistive film,and cavities and formed under respective thermosensible resistive films by removingpartially the plate-like substrate, and in which flow velocity of fluid is measured on heattransfer phenomenon from the portion heated by the heat resistor to fluid, and topsurface of the cavity located under the fluid temperature-measuring resistor is formedwithin the part where the fluid temperature-measuring resistor is located.
申请人：Masahiro Kawai
地址：Tokyo JP
国籍：JP
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